Surfscan 4500
Model 4500 Main System can handle from 2″ up to 6″/150mm wafers.
Submicron sensitivity, detects 0.2 micron particles and handles high scattering surfaces such as metals, polysilicon and cvd films.
Submicron sensitivity, detects 0.2 micron particles and handles high scattering surfaces such as metals, polysilicon and cvd films.
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