Acid Bench/Wet Etch Tool
The acid bench is a unit consisting of 4 acid baths and 2 Di Water Dump Rinse tanks.
The tanks can accommodate 4 inch up to 12 inch substrates. The acids are filled by bulk chemical fill. Two of the acid tanks have heating controllers, giving the option of temperature controlled acid processing.
All four acid tanks have the recirculation feature, which gently agitates the acid.
Full PPE is worn when using the bench (chemical resistant apron / chemical resistant gauntlets / face shield) on top of standard cleanroom clothing.
